Classification and scale of electron gas
Natural gas jargon. The gases used in the semiconductor industry are collectively referred to as electronic gases. It can be divided into three categories: pure gas, pure gas and semiconductor special material gas. Special material gas is mainly used in epitaxy, doping and etching process. High purity gas is mainly used as dilution gas and carrier gas. What is an electron gas? What is the current size of Heli Gas (Shanghai) Co., LTD.?
Electron gas is an important branch of special gas. Electronic gases can be classified into electronic, LSI (large scale integrated circuit), VLSI (very large scale integrated circuit) and ULSI (very large scale circuit) grades depending on their purity and use.
In general, those about 5N can be called electron masses. 5N means five nines, or 99.999%. The electron mass gas purified on site can reach 8N~10N. The electronic grade 7Ns in the tank are those used in the semiconductor industry to make silicon wafers and the circuits on them.
In recent years, with the rapid development of ultra large scale integrated circuit, flat panel, photovoltaic power generation and other industries, the market demand of electronic gas has increased greatly, and the localization of electronic gas has become an irresistible trend. It is obvious that China has made gratifying progress in localization: domestic high purity ammonia has changed the market monopoly pattern of foreign natural gas companies, the "valuable but unavailable" era of high purity hydrogen tetrafluoride is over, and high purity hydrogen chloride has successfully opened the domestic market.